High-mobility diamond field effect transistor with a monocrystalline h-BN gate dielectric
نویسندگان
چکیده
منابع مشابه
Low on-resistance diamond field effect transistor with high-k ZrO2 as dielectric
Although several high-k insulators have been deposited on the diamond for metal-insulator-semiconductor field effect transistors (MISFETs) fabrication, the k values and current output are still not fully satisfactory. Here, we present a high-k ZrO2 layer on the diamond for the MISFETs. The k value for ZrO2 is determined by capacitance-voltage characteristic to be 15.4. The leakage current densi...
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ژورنال
عنوان ژورنال: APL Materials
سال: 2018
ISSN: 2166-532X
DOI: 10.1063/1.5055812